| 发明名称 |
APPARATUS AND METHOD FOR FILM MANUFACTURE, APPARATUS AND METHOD FOR DEVICE MANUFACTURE, AND DEVICE |
| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To decrease a peak current value with a simple circuit constitution. <P>SOLUTION: Piezoelectric elements PZ are arranged corresponding to a plurality of nozzles 11, which spout functional liquid according to a driving waveform supplied to the piezoelectric elements PZ. Also provided are: a waveform generation part 15 which generates a group of waveforms consisting of a plurality of driving waveforms which are set with time differences; and a wavelength selection part 13 which selects the specified driving waveform from the group of generated waveform and supplies the selected waveform to the piezoelectric elements PZ. <P>COPYRIGHT: (C)2003,JPO</p> |
| 申请公布号 |
JP2003255123(A) |
申请公布日期 |
2003.09.10 |
| 申请号 |
JP20020060719 |
申请日期 |
2002.03.06 |
| 申请人 |
SEIKO EPSON CORP |
发明人 |
KOYAMA MINORU |
| 分类号 |
G02B5/20;G02F1/13;(IPC1-7):G02B5/20 |
主分类号 |
G02B5/20 |
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