| 摘要 |
PROBLEM TO BE SOLVED: To highly efficiently move a correction optical system in a mutually orthogonal direction while making first and second actuators drivable in a narrow clearance without enlarging or complicating a device. SOLUTION: The correction optical system vibration exciter comprises: the correction optical system 1; the first and second actuators 6-11 to be driven in the narrow clearance, which are arranged at two corners to be the equal angles of a rectangular equilateral triangle whose vertex is an optical axis 2 within a plane orthogonal to the optical axis, and for which respective driving directions (upper direction in the figure) for moving the correction optical system are parallelly unified; and guide means 4 and 5 arranged at the middle position of the first and second actuators and made to act so as to inhibit the first and second actuators from moving in a direction other than the unified driving direction and to allow the fine rotary movement of the correction optical system with the driving center of one actuator as a rotation center when the other actuator is driven. COPYRIGHT: (C)2003,JPO |
