| 摘要 |
PROBLEM TO BE SOLVED: To provide a measuring method in which the correction value for a dimension-measured value with an end standard can be easily found by a light wave interference method. SOLUTION: This correction value measuring method is provided with a process (S10) for bringing close contact for ringing in parallel one end face 12a of a reference end standard for light reflection, and generating no phase change in the light reflection, and one end face 14a of the measuring end standard, onto a light transmitting base plate 10a, a phase shift acquiring process (S14) for making interfering light 38 incident into a plate 10 from a non-ringing face 10b, for making a transmitting light thereof incident on the end ringing side end faces 12a, 14a from the orthogonal direction thereof, for forming reference interference light by reflected light from the reference end standard 12a, and for forming measuring interference light by reflected light from the end standard 14a, so as to find a phase shift between an interference fringe 42 by the reference interference light and an interference fringe 44 by the measuring interference light, and a correction value acquiring process for obtaining a phase variation of the end standard 14 based on the phase shift. COPYRIGHT: (C)2003,JPO
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