发明名称 BLACKENING FURNACE
摘要 PROBLEM TO BE SOLVED: To provide a blackening furnace with which the disturbance in the atmosphere of a reaction tube due to the influence of outside air or intake of the outside air by a body to be treated can be suppressed and a good quality blackened film can be formed without causing red rust on the body to be treated in blackening treatment. SOLUTION: The blackening furnace has a muffle tube 3 in which aperture grills being the bodies to be treated are heated and subjected to blackening treatment under an atmosphere of blackening gases, a carrier belt 5 which is positioned through the muffle tube 3 and carries in or out the aperture grills, partition means 11 which are positioned at a carry-out port 3b and a carry-in port 3a of the muffle tube 3 so as to partition the atmosphere in the muffle tube 3 from the outside air and opens when the aperture grills are carried in or out, and exhaust means 12, 20 which are positioned at the carry-out port 3b and the carry-in port 3a so as to exhaust gas from both sides in the vertical direction to the carrier belt 5. COPYRIGHT: (C)2003,JPO
申请公布号 JP2003253421(A) 申请公布日期 2003.09.10
申请号 JP20020058994 申请日期 2002.03.05
申请人 SONY CORP 发明人 NOJI SUSUMU
分类号 C23C8/18;F27B5/04;F27B5/16;F27D7/06;H01J9/14;(IPC1-7):C23C8/18 主分类号 C23C8/18
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