发明名称 |
Method of forming a low dielectric constant insulation film |
摘要 |
A silicon-containing insulation film having high mechanical strength is formed on a semiconductor substrate by (a) introducing a reaction gas comprising (i) a source gas comprising a silicon-containing hydrocarbon compound containing cross-linkable groups, (ii) a cross-linking gas, and (iii) an inert gas, into a reaction chamber where a substrate is placed; (b) applying radio-frequency power to create a plasma reaction space inside the reaction chamber; and (c) controlling a flow of the reaction gas and an intensity of the radio-frequency power. <IMAGE>
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申请公布号 |
EP1342809(A1) |
申请公布日期 |
2003.09.10 |
申请号 |
EP20030251216 |
申请日期 |
2003.02.28 |
申请人 |
ASM JAPAN K.K. |
发明人 |
TSUJI, NAOTO;MORI, YUKIHIRO;TAKAHASHI, SATOSHI;MATSUSHITA, KIYOHIRO;FUKAZAWA, ATSUKI;TODD, MICHAEL |
分类号 |
C23C16/40;H01L21/312;H01L21/314;H01L21/316;(IPC1-7):C23C16/40 |
主分类号 |
C23C16/40 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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