MANUFACTURING DEVICE OF SI NANOPARTICLES USING MICROWAVE PLASMA AND MANUFACTURING METHOD USING THE SAME

摘要

The present invention relates to a producing device of Si nanoparticles using a microwave plasma, and to a producing method of Si nanoparticles using the same. The producing device of nanoparticles comprises: a reaction unit (110); a precursor gas injection unit (120) which injects silicon precursor gas; an output supply unit (130) which produces microwaves; a swirl gas injection unit (140); and a reaction gas injection unit (150).