| 摘要 |
PROBLEM TO BE SOLVED: To make precisely detectable a height position even when the scanning speed is changed for wafer by wafer and shot by shot. SOLUTION: In this detector for detecting the face position of a measuring point within an area, using a measuring means, while scanning relatively the area having a pattern structure with respect to the measuring means for measuring the face position in a portion on a body face, a driving parameter for the measuring means is determined so that the measuring range of the measuring means for the measuring point is to be in a preset range, in response to the speed of the relative scanning applied for the area, prior to the detection of the face position in the area. COPYRIGHT: (C)2003,JPO |
