LIGHT WAVE COHERENCE TOMOGRAM MEASURING SYSTEM WITH COMPOSITE LIGHT SOURCE

摘要

PROBLEM TO BE SOLVED: To provide a light wave coherence tomogram measuring system with a composite light source capable of efficiently superimposing a plurality of beams of light one on another and achieving a high spatial resolution. SOLUTION: The system is provided with both a two-dimensional optical system A for the composite light source and an optical system B for measurements and capable of achieving a high spatial resolution. The two-dimensional optical system A for the composite light source comprises a low-coherence light emitting element 1 for emitting the plurality of beams of light, a plurality of lenses 2 and 3, and a diffusing plate 4 and is capable of efficiently superimposing the plurality of beams of light one on another. The optical system B for measurements uses the uniformly superimposed light from the two-dimensional optical system A for the composite light source. COPYRIGHT: (C)2003,JPO