发明名称 Semiconductor device baking method
摘要 A semiconductor chip (2) is encapsulated with resin into a plastic package (5) so as to form a semiconductor device (10) having the semiconductor chip (2) in the plastic package (5). The semiconductor device (10) is then received in a container (11) so that the container (11) is vacuumed up to a vacuum degree of 10<-6> or less. Thereafter, the semiconductor device (10) is baked at a temperature within a range of 165 DEG C to 175 DEG C for 6 hours or more by using a hot plate (13). Thus, this baking under the reduced pressure prevents generation of blisters and cracks on the plastic package (5). <IMAGE>
申请公布号 EP1134800(A3) 申请公布日期 2003.09.10
申请号 EP20010302315 申请日期 2001.03.14
申请人 SHARP KABUSHIKI KAISHA 发明人 MITSUMUNE, KAZUMASA
分类号 H01L23/28;H01L21/56 主分类号 H01L23/28
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