| 摘要 |
PROBLEM TO BE SOLVED: To obtain an image emphasized with a resolution higher than the spot diameter of a laser beam emitted from a laser generation means. SOLUTION: A laser scan image device radiates the emitted laser beam as a minute spot to a sample 14 supported on a sample stage 3 and moves the laser beam in one prescribed direction by an optical scanning means 4 to scan the sample and sequentially moves the sample stage 3 in the direction orthogonal to the scanning direction by a stage driving means 5 and processes a reception signal detected by reception of a reflected beam from the sample 14 to form an image. A scan start control member 32 made of a material having a low light reflectivity is provided in the start position in the scanning direction of the laser beam to the sample 14, and the laser beam is caused to enter and scan the sample 14 from the member position at intervals of a prescribed gap shorter than the spot diameter of the laser beam to detect the reception signal, and reflectivities of the sample at intervals of the prescribed gap are successively operated to generate image data. COPYRIGHT: (C)2003,JPO
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