| 摘要 |
PROBLEM TO BE SOLVED: To easily fix a probe head to a probe head holder. SOLUTION: A probe head mount 14 has a first surface receiving a measuring probe head 12, and a second surface having at least one groove extending from the first surface. At least one holding member 18 arranged in the circumferences of the probe head mount 14 and the probe head 12 is a ring with high elasticity and high hoop strength. A first part of the holding member is arranged inside the groove of the probe head mount, a second part of the holding member is arranged in the circumference of the measuring probe head, and the probe head 12 is flexibly fixed to the mount 14. COPYRIGHT: (C)2003,JPO
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