| 摘要 |
PROBLEM TO BE SOLVED: To easily manufacture a high functional particle in a process. SOLUTION: A raw material gas of the particle or the raw material containing droplet is heated, after the particle is formed and aggregated, dilution gas is fed so as to suppress aggregation of the particle, the obtained linear aggregate particle is reheated, and thereby the aggregate particle is made to be spherical. COPYRIGHT: (C)2003,JPO
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