Variable capacitance element

摘要

A coplaner line 3 or signal conduction and a movable body 4 displacing vertically through a supporting bar 6 are provided on a substrate 2. A movable electrode 7 is provided between a driving electrode 8 and driving electrodes 12 and 14. Voltage is applied between the movable electrodes 7 and 8, the movable electrode 7 is pressed against the line 3 through a dielectric film 10. Thus, high frequency signals conducting through the line 3 are shut off. When voltage is applied between the electrodes 12 and 14, the movable electrode 7 and the dielectric film 10 are moved apart from the line 3. Thus, high frequency signals can be conducted through the line 3. Therefore, malfunction of the variable capacitance type switch 1 can be prevented even when the movable electrode 7 is unexpectedly displaced by vibration, impact and so on.