LACTONE COPOLYMER RESIN AND RADIATION-SENSITIVE RESIN COMPOSITION

摘要

PROBLEM TO BE SOLVED: To provide a lactone copolymer resin having high transparency to a radiation and suitable for use as the resin component of a chemically amplified resist capable of solving the problem of trade-off of resolution and exposure latitude and excellent also in dry etching resistance and pattern shape and to provide a radiation-sensitive resin composition comprising the lactone copolymer resin.

SOLUTION: The lactone copolymer resin comprises a resin which has a repeating unit represented by formula (1) and at least one selected from a repeating unit represented by formula (2-1) and a repeating unit represented by formula (2-2) and becomes alkali-soluble under the action of an acid. The radiation-sensitive resin composition comprises the lactone copolymer resin and a radiation-sensitive acid generator. In the formulae, R1-R3are each H or methyl.

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