| 摘要 |
PROBLEM TO BE SOLVED: To provide a pressure sensor whose airtightness has been enhanced. SOLUTION: This pressure sensor 1 has a lid member 10 having a pressure leading-in hole, a housing 20, a pressure detecting element 51 composed of a semiconductor device having a piezoresistance effect, a holder 30 for holding the detecting element 51, and a connector case 70. Further, the sensor 1 is provided with a pressure sensor body in which a referring pressure space 72 is formed by joining the detecting element 51 and the holder 30 hermetically. To the lower part of the pressure sensor body, a supporting member 60 made of metal is stuck, and the part between the supporting member 60 and an opening 34 formed in the holder 30 is hermetically joined with a hermetic seal 65. COPYRIGHT: (C)2003,JPO
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