| 摘要 |
PROBLEM TO BE SOLVED: To provide a shape measurement method and a device for it capable of performing a phase connection by means of a simply structured device. SOLUTION: This grid projection shape measurement method includes a step for projecting a frequency modulation grid, in which a frequency and luminance are periodically varied respectively according to a position, to a measured object while moving the frequency modulation grid at a predetermined speed, a step for continuously photographing the measured object, to which the grid is projected, at predetermined intervals; a step for finding a phase distribution about the frequency and that about the luminance respectively from the photographed image; a step for performing phase connection by using the phase distribution about the frequency and that about the luminance; and a step for matching the phase distribution after phase connection to a height distribution of the measurement object. COPYRIGHT: (C)2003,JPO
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