OPTICAL IMAGING SYSTEM AND OPTICAL IMAGE DATA PROCESSING METHOD

摘要

PROBLEM TO BE SOLVED: To provide an optical imaging system having a spatial resolution in a level of 50 nm and an optical image data processing method, which enable easy and stable scanning optical microscopic observation of high spatial resolution. SOLUTION: Arithmetics of integrating a two-dimensional light intensity distribution reconstituted by inverse arithmetics taking a dot image distribution function as a seed function on the basis of a two-dimensional light intensity distribution of each light radiation area obtained by a two-dimensional light detector and constituting a two-dimensional light intensity distribution of an overall observation area are executed in a computer provided in a data processing system to display the light intensity distribution of the overall observation area as an image. In executing the arithmetics, each of optical signal intensity data constituting the two-dimensional light intensity distribution of each light radiation area obtained by the two-dimensional light detector is multiplied by the least square filter based on the dot image distribution function to correct the signal light intensity, and then the two-dimensional light intensity distribution is reconstituted. COPYRIGHT: (C)2003,JPO