ACRYLIC RESIN AND CONTAMINATION-PREVENTING COATING MATERIAL

摘要

PROBLEM TO BE SOLVED: To provide a contamination-preventing coating material which allows to enjoy excellent prevention from contamination for a long term and provides the improved coating film with a favorable performance to keep a stable polishing rate for a long term and to be resistant against a crack. SOLUTION: The coating material comprises an acrylic resin which has a side chain substituted with both at least one group represented by formula (1) (wherein R1, R2and R3are each identically or differently a 1-20C hydrocarbon residue) and at least one group represented by formula (2) (wherein X is a group represented by formula (3); n is 0 or 1; Y is a hydrocarbon; M is a divalent metal; and A is an organic monobasic acid residue). COPYRIGHT: (C)2003,JPO