EVAPORATION VESSEL AND FILM DEPOSITION SYSTEM HAVING EVAPORATION VESSEL

摘要

PROBLEM TO BE SOLVED: To provide an evaporation vessel in which a uniform organic thin film is obtained. SOLUTION: An organic material 29 is arranged inside a cylindrical body 23 and is heated by heat radiation from a heat radiator 27 inserted into the cylindrical body 23 and energized to raise the temperature and heat conduction from the cylindrical body 23. The inside of the cylindrical body 23 is saturated by the vapor released from the organic material 29, and a fixed quantity of vapor is released from a plurality of the releasing holes 24 provided in line on the side surface of the cylindrical body 23. COPYRIGHT: (C)2003,JPO