MEMS microphone with reduced parasitic capacitance

摘要

A MEMS microphone has reduced parasitic capacitance. The microphone includes a trench electrically separating an acoustically active section of a backplate from an acoustically inactive section of the backplate.

主权项

1. A MEMS microphone, comprising:
an acoustically active region; a rim region surrounding the acoustically active region; a membrane in a membrane layer, the membrane having a section in the acoustically active region and a section in the rim region; a first backplate in a first backplate layer, the first backplate having a section in the acoustically active region and a section in the rim region; and a first trench that electrically separates the membrane section of the rim region from the membrane section of the acoustically active region and/or the first backplate's section of the rim region from the first backplate's section of the acoustically active region, wherein a resistance between the separated regions is 10GΩ or more.