| 摘要 |
PROBLEM TO BE SOLVED: To provide a six axial force sensor which suppresses the problem of interference of other axes, increases level of measurable axial forces remarkably, extends an application range, and contributes to its being put to practical use. SOLUTION: This sensor is provided with a six axial force sensor chip 11 which is formed using a semiconductor substrate, and has at least an acting portion 21 which receives an external force and a supporting portion 22 for supporting this acting portion, an external force applying board 34 which is arranged around the six axial force sensor chip, and to which the external force is applied, and a structure composed of a pedestal portion 12 for supporting the six axial force sensor chip, external force buffering mechanisms (31, 32, 33) for fixing the external force applying board to the pedestal portion, and a uniting rod 17 being an external force transmitting mechanism. The applying board 34 and the acting portion 21 are united with the uniting rod 17. COPYRIGHT: (C)2003,JPO
|
