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发明名称
TARGET COMPRISING THICKNESS PROFILING FOR AN RF MAGNETRON
摘要
申请公布号
EP1341948(A1)
申请公布日期
2003.09.10
申请号
EP20010980095
申请日期
2001.11.06
申请人
UNAXIS TRADING AG
发明人
VOSER, STEPHAN;LORENZ, EDUARD, KARL
分类号
C23C14/34;G11B7/26;H01J37/34;(IPC1-7):C23C14/34
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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