| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method and a device for evaluating reliability of a spectrum and correcting it, in X-ray analysis of a microfine region part of a sample. <P>SOLUTION: A characteristic X-ray 6 excited from an electron beam 5 irradiation region is taken into a semiconductor detector 1. An electric signal corresponding to the X-ray intensity is formed in the semiconductor detector 1, transferred to PHA 2, and converted into a digital signal. The signal is transferred to a data processing computer 3, and an X-ray analytical spectrum is split and preserved, for example, in each integration time t set beforehand, and information having the possibility of fluctuation with the passage of time is extracted and displayed simultaneously with spectrum acquisition by a spectrum continuous in time, to thereby enable to decide simultaneously whether integration is to be continued or discontinued during the measurement. In addition, fluctuation of the sample state resulting from irradiation with a high luminance and ultrafine electron beam can determined by finding the fluctuation with the passage of time. <P>COPYRIGHT: (C)2003,JPO</p> |
