| 摘要 |
PROBLEM TO BE SOLVED: To provide a simple and easy change of illumination forms and to acquire video data of high accuracy in the respective illumination forms while realizing a viewing form of a high degree of freedom. SOLUTION: A base 10 having an imaging device 101 is arranged across an optical section 12 having an optical axis of a straight form so as to face the lower side of a stage 11. An illumination head 24 is assembled and arranged at the stage 11 turnably adjustably around two axes different from the optical axis by means of first and second arms 13 and 18. COPYRIGHT: (C)2003,JPO
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