| 摘要 |
PROBLEM TO BE SOLVED: To provide a driving device and a driving method for a measurement machine capable of stably driving and controlling a fine adjustment mechanism slightly shifting a probe and a coarse adjustment mechanism greatly shifting the probe, respectively. SOLUTION: This driving device is provided with the fine adjustment mechanism 21 finely shifting the probe 1 to an object to be measured 7, the coarse adjustment mechanism 22 greatly shifting the probe 1 to the object to be measured 7, a measurement force detection means 4 detecting measurement force between the probe 1 and the object 7, a position detection means 3 detecting the position of the probe 1, a control means 5 driving the fine adjustment mechanism 21 and the coarse adjustment mechanism 22 so that the measurement force reaches a predetermined value, a fine displacement quantity separation computing means 521 finding a displacement quantity of the fine adjustment mechanism 21, and a coarse displacement separation computing means 522 finding the displacement quantity of the coarse adjustment mechanism 22. The displacement quantities of the fine adjustment mechanism 21 and the coarse adjustment mechanism 22 found by the fine displacement quantity separation computing means 521 and the coarse displacement quantity separation computing means 522 are used as a position feedback quantity for driving and controlling the coarse adjustment mechanism 22. COPYRIGHT: (C)2003,JPO
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