发明名称 Conductive biasing member for metal layering
摘要 A contact ring (152) applies electroplating to a substrate (148) having an electrically conductive portion. The contact ring comprises an annular insulative body (170), a conductive biasing member (165), and a seal member (169). The annular insulative body defines a central opening. The conductive biasing member is configured to exert a biasing force upon the substrate. <IMAGE>
申请公布号 EP1099781(A3) 申请公布日期 2003.09.10
申请号 EP20000310039 申请日期 2000.11.10
申请人 APPLIED MATERIALS, INC. 发明人 STEVENS, JOSEPH;COWAN, NORMAN;TZOU, CHIEN-SHIUNG
分类号 H01L21/28;C25D7/12;C25D17/06;H01L21/288 主分类号 H01L21/28
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