发明名称 |
Conductive biasing member for metal layering |
摘要 |
A contact ring (152) applies electroplating to a substrate (148) having an electrically conductive portion. The contact ring comprises an annular insulative body (170), a conductive biasing member (165), and a seal member (169). The annular insulative body defines a central opening. The conductive biasing member is configured to exert a biasing force upon the substrate. <IMAGE> |
申请公布号 |
EP1099781(A3) |
申请公布日期 |
2003.09.10 |
申请号 |
EP20000310039 |
申请日期 |
2000.11.10 |
申请人 |
APPLIED MATERIALS, INC. |
发明人 |
STEVENS, JOSEPH;COWAN, NORMAN;TZOU, CHIEN-SHIUNG |
分类号 |
H01L21/28;C25D7/12;C25D17/06;H01L21/288 |
主分类号 |
H01L21/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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