发明名称 |
CERIUM BASED ABRASIVE MATERIAL AND METHOD FOR EVALUATING CERIUM BASED ABRASIVE MATERIAL |
摘要 |
There is provided a cerium-based abrasive which enables formation of a highly accurate polished surface and has improved grindability. There is also provided a method of evaluating cerium-based abrasives in a relatively easy manner. In order to achieve the above objects, the cerium-based abrasive of this invention is a cerium-based abrasive containing 40% by weight or more of cerium oxide (on the basis of the total weight of rare earth oxides) which is characterized by further containing 0.5 to 10% by weight of fluorine per 100% by weight of the cerium-based abrasive, in terms of atomic weight, and polishing particles consisting of crystals with a lattice constant measured by an X-ray powder diffraction method ranging from 0.544 to 0.560 nm. And the method of evaluating cerium-based abrasives of this invention is a method including the steps of: analyzing samples of cerium-based abrasive to be subjected to evaluation by the X-ray powder diffraction method; obtaining a diffraction angle (&thetas;) of at least one of maximum peaks appearing over the prescribed four ranges; and calculating a lattice constant of crystals constituting the polishing particles of the cerium-based abrasive using the above diffraction angle (&thetas;).
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申请公布号 |
EP1342766(A1) |
申请公布日期 |
2003.09.10 |
申请号 |
EP20010270579 |
申请日期 |
2001.12.12 |
申请人 |
MITSUI MINING & SMELTING CO., LTD. |
发明人 |
YAMASAKI, HIDEHIKO;UCHINO, YOSHITSUGU;TAKAHASHI, KAZUAKI |
分类号 |
B24D3/34;C01F17/00;C09G1/02;C09K3/14;G01N23/20;(IPC1-7):C09K3/14;B24B37/00;G01N33/40 |
主分类号 |
B24D3/34 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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