摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an inkjet head which can discharge a minute amount of high-viscosity ink, and provide an inkjet recorder with the inkjet head, a manufacturing apparatus for color filters, an electroluminescence board manufacturing apparatus, and a micro array manufacturing apparatus. <P>SOLUTION: The inkjet head is provided with nozzle holes 4 for discharging ink liquid drops, discharge chambers 6 communicating with respective nozzle holes 4, diaphragms 5 for constituting at least one walls of discharge chambers 6, and a driving means for generating deformation to the diaphragms 5. The driving means comprises electrodes 21 for deforming the diaphragms 5 by a static electricity. A compliance of the diaphragm 5 is set within 3.32×10<SP>-20</SP>m<SP>5</SP>/N-2.28×10<SP>-19</SP>m<SP>5</SP>/N, an ink viscosity is set within 5-50 cP, and an amount of ink liquid drops to be discharged at a time is set within 5-30 ng. <P>COPYRIGHT: (C)2003,JPO</p> |