| 摘要 |
PROBLEM TO BE SOLVED: To provide a soaking apparatus reduced in weight, improving the surface hardness of a surface plate and processability and enabling the enhancement of productivity and cost reduction. SOLUTION: The soaking apparatus is equipped with the surface plate 11 for holding an object to be processed and a soaking means for uniformizing the surface temperature of the surface plate. The surface plate has a plurality of insertion holes 8 provided thereto inwardly from the outer peripheral edge part thereof and the soaking means is constituted so as to use heat pipes 9 comprising a plurality of pipe materials 10 for forming the hermetically sealed containers respectively inserted in the insertion holes of the surface plate and the operative liquid 4 enclosed in the pipe materials. COPYRIGHT: (C)2003,JPO
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