发明名称 |
Method and apparatus for asymmetric processing of front side and back side of semiconductor substrates |
摘要 |
An asymmetric double-sided substrate scrubber is provided. The asymmetric double-sided substrate scrubber includes a first roller and a second roller. The first roller is constructed from a first material having a first density and the second roller is constructed from a second material having a second density. The second density is designed to be greater than the first density. The first roller is designed to be applied onto a first side of a substrate with a first force and the second roller is designed to be applied onto a second side of the substrate with a second force. The second force is configured to be substantially equivalent to the first force.
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申请公布号 |
US6616516(B1) |
申请公布日期 |
2003.09.09 |
申请号 |
US20010017109 |
申请日期 |
2001.12.13 |
申请人 |
LAM RESEARCH CORPORATION |
发明人 |
RAVKIN MICHAEL;DE LARIOS JOHN;MIKHAYLICH KATRINA |
分类号 |
B08B1/04;B24B37/04;H01L21/00;(IPC1-7):B24B7/00 |
主分类号 |
B08B1/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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