| 摘要 |
PROBLEM TO BE SOLVED: To provide a filter element capable of being made thinner. SOLUTION: Both upper and rear side surfaces of a support 12 are respectively covered with filter films and an outer frame 14 is provided so as to surround the outer peripheral edge of the support to form mutually communicating suction passages 20a-20d between the inner surface of the outer frame 14 and the outer surface of the support 12. Negative pressure is generated in the support 12 by the suction through a suction port 21 formed to the outer frame 14. That is, suction is applied in the outer peripheral edge direction of the support 12. Therefore, the filter element 11 can be made thin, for example, as compared with a case for forming a suction space between a pair of the supports because the suction space is dispensed with. Further, hermetic sealing treatment is applied to the contact part of the outer frame 14 with the outer surface of the support 12 by an adhesive, or the like. COPYRIGHT: (C)2003,JPO
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