| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To improve machining accuracy in machining a workpiece in such a shape that the height of the machined surface greatly differs depending on a place on the surface. <P>SOLUTION: In this laser beam machining device 10, in the case of machining while a workpiece 1 is moved in a direction (arrows x, y) vertical to the irradiation direction of a laser beam L1, the height of the machining surface 1a along the irradiation direction is measured, at the place that becomes a destination in the movement of the laser beam L1 irradiation position, by means of a measuring instrument 25 having a CCD camera 24 and, on the basis of this measurement, a variable-focus lens apparatus 16 is controlled to adjust the focal position of the laser beam L1. Meanwhile, in the case of machining while the workpiece 1 is fixed, the height of the machining surface 1a is measured at the irradiation position of the laser beam L1 by means of a laser measuring machine 20 and, on the basis of this measurement, the variable-focus lens apparatus 16 is controlled to adjust the focal position of the laser beam L1. Consequently, the laser beam L1 can be surely converged on the machining surface 1a. <P>COPYRIGHT: (C)2003,JPO</p> |
