| 摘要 |
PROBLEM TO BE SOLVED: To provide a workpiece holding device capable of detecting whether a workpiece is correctly clamped by a chuck member or not. SOLUTION: This workpiece holding device 10 is provided with a chuck base member 13 and the chuck member 40 composed of a plurality of chuck claws 41. A chuck face 46 for grasping an outer peripheral face 1a of the workpiece 1 is formed on the chuck claw 41. A first air hole 50 is formed on the chuck face 46. A support metal member 60 is provided on an inner side of the chuck member 40. The support metal member 60 has a seating face 61 on which an end face 1b of the workpiece 1 is abutted. A second air hole 62 is formed on the seating face 61. An air supply source 25 is connected with the air holes 50, 62. Back pressure or differential pressure of air supplied by the air supply source 25 is detected by a pressure detector 30 to discriminate whether the workpiece 1 is in contact with the chuck face 46 and the seating face 61 correctly or not based on the detected pressure. COPYRIGHT: (C)2003,JPO
|
