| 发明名称 |
METHOD OF FORMING LAYERS OF OXIDE OF DIFFERENT THICKNESSES ON A SURFACE OF A SUBSTRATE |
| 摘要 |
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| 申请公布号 |
AU2002351408(A1) |
申请公布日期 |
2003.09.09 |
| 申请号 |
AU20020351408 |
申请日期 |
2002.12.20 |
| 申请人 |
ADVANCED MICRO DEVICES, INC. |
发明人 |
KARSTEN WIECZOREK;FALK GRAETSCH;STEPHAN KRUEGEL |
| 分类号 |
H01L21/28;H01L21/8234;H01L21/8238;H01L27/088;H01L27/092;H01L29/51;(IPC1-7):H01L21/311;H01L21/314;H01L21/318;H01L21/823 |
主分类号 |
H01L21/28 |
| 代理机构 |
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代理人 |
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