| 摘要 |
PROBLEM TO BE SOLVED: To minimize a working error even when an objective surface shape is a free curved surface with no symmetric property. SOLUTION: Grinding processes (steps 1, 2) and a polishing process (step 4) to work a working region of a quartz block which is a workpiece, a correction process (step 5) to apply correction work in the working region worked in the above processes (steps 1, 2, 4) and a marking process (step 3) to work an alignment mark in a region except for the working region before the correction process are carried out. The shape of the working region is measured (step 6) with the alignment mark as a standard in the correction process (step 5), and the correction work is applied in accordance with the result of measurement (step 8). COPYRIGHT: (C)2003,JPO
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