SOG materials for spacer anodic bonding and method of preparing the same

摘要

Disclosed herein is an SOG (Spin on Glass) material for spacer anodic bonding, which includes: 0.1~3 wt % of tetraethyl orthosilicate (TEOS); 0.1~5 wt % of methyl triethyl orthosilicate (MTEOS); 20~30 wt % of ethanol; 0.1~2 wt % of acetic acid solution containing alkali metal ions; and 0.1~10 wt % of water. The solid content of alkali metal elements in the acetic acid solution containing alkali metal ions is 5%~60%, and the pH value of the SOG material is 4~6.