| 发明名称 |
METHOD FOR MANUFACTURING FLAT PANEL DISPLAY SUBSTRATES |
| 摘要 |
A system an method for generating thin film transistors, the system employing a non-excimer laser beam interacting with amorphous silicon disposed on a substrate surface to form mutually spaced apart silicon crystals on the surface. |
| 申请公布号 |
AU2003209628(A1) |
申请公布日期 |
2003.09.09 |
| 申请号 |
AU20030209628 |
申请日期 |
2003.02.24 |
| 申请人 |
ORBOTECH LTD. |
发明人 |
ABRAHAM GROSS;ARIE GLAZER |
| 分类号 |
G02F1/1368;H01L21/20;H01L21/268;H01L21/336;H01L29/786;(IPC1-7):G02F1/136 |
主分类号 |
G02F1/1368 |
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