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发明名称
Cleaning apparatus using atmospheric pressure plasma
摘要
申请公布号
AU2003208625(A8)
申请公布日期
2003.09.09
申请号
AU20030208625
申请日期
2003.02.20
申请人
RADIIONTECH CO., LTD
发明人
DUG-GYU LIM
分类号
H05H1/24;B08B7/00;B65G49/06;H01J37/32;H01L21/00;(IPC1-7):H01L21/306;B08B11/00;C23F4/00
主分类号
H05H1/24
代理机构
代理人
主权项
地址
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