| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser beam machining method that enables a numerical aperture of a hole to be enhanced, and also to provide a laser beam machining device that facilitates implementation of this method. <P>SOLUTION: A workpiece 8 is prepared containing a base member and a coating layer formed on the surface of the base member, with the base member comprising a material harder to be etched by a laser beam than the coating layer. In the workpiece, a pulsed laser beam is made incident on the surface of the coating layer, in which a hole is formed so as to reach the base member by the energy of the laser beam. During the period of forming one hole, the pulse energy is increased with a lapse of time. <P>COPYRIGHT: (C)2003,JPO</p> |
