| 发明名称 |
GRINDING AND POLISHING MACHINE WITH WORK SPINDLE AND TOOL SPINDLE |
| 摘要 |
PROBLEM TO BE SOLVED: To provide a grinding and polishing device capable of easily and certainly carrying out change-over of grinding and polishing to each other without requiring complicated adjustment. SOLUTION: This grinding and polishing device is furnished with a cam drive mechanism 170 to advance and retreat each of tool spindles against a work spindle by moving each of sub-assemblies. COPYRIGHT: (C)2003,JPO |
| 申请公布号 |
JP2003251557(A) |
申请公布日期 |
2003.09.09 |
| 申请号 |
JP20020358116 |
申请日期 |
2002.12.10 |
| 申请人 |
UNOVA UK LTD |
发明人 |
STOCKER MARK ANDREW;FALKNER DERMOT ROBERT;MORANTZ PAUL MARTIN;PIERSE MICHAEL GEORGE |
| 分类号 |
B24B41/06;B23Q1/36;B23Q3/18;B23Q17/24;B24B1/00;B24B5/04;B24B5/06;B24B9/00;B24B9/06;B24B17/04;B24B17/06;B24B19/02;B24B41/00;B24B41/02;B24B41/04;B24B47/12;B24B49/00;B24B49/02;B24B49/12;B24B53/00;B24B53/07;B24B55/02;H01L21/00;H01L21/304;H01L21/306;H01L21/66;(IPC1-7):B24B47/12 |
主分类号 |
B24B41/06 |
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