发明名称 Device for use with a micro-electro-mechanical system (MEMS) optical device and a method of manufacture therefor
摘要 A device for use in a micro-electro-mechanical system (MEMS) optical system. The device includes a substrate having opposing first and second sides, wherein the first side has a light reflective optical layer located thereover, and the second side is an irregular surface.
申请公布号 US6618184(B2) 申请公布日期 2003.09.09
申请号 US20010825016 申请日期 2001.04.03
申请人 AGERE SYSTEMS INC.;LUCENT TECHNOLOGIES INC. 发明人 JIN SUNGHO;MAVOORI HAREESH;RYF ROLAND
分类号 B81B3/00;G02B6/32;G02B6/35;G02B26/08;(IPC1-7):G02B26/00 主分类号 B81B3/00
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