发明名称 |
Device for use with a micro-electro-mechanical system (MEMS) optical device and a method of manufacture therefor |
摘要 |
A device for use in a micro-electro-mechanical system (MEMS) optical system. The device includes a substrate having opposing first and second sides, wherein the first side has a light reflective optical layer located thereover, and the second side is an irregular surface.
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申请公布号 |
US6618184(B2) |
申请公布日期 |
2003.09.09 |
申请号 |
US20010825016 |
申请日期 |
2001.04.03 |
申请人 |
AGERE SYSTEMS INC.;LUCENT TECHNOLOGIES INC. |
发明人 |
JIN SUNGHO;MAVOORI HAREESH;RYF ROLAND |
分类号 |
B81B3/00;G02B6/32;G02B6/35;G02B26/08;(IPC1-7):G02B26/00 |
主分类号 |
B81B3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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