DEVICE AND METHOD FOR DRIVING HEAD, DROPLET DISCHARGING DEVICE, HEAD DRIVE PROGRAM, METHOD FOR MANUFACTURING DEVICE, AND DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a head driving device and method capable of discharging a required amount of a viscous body from a head provided with a pressure generation element such as a piezoelectric element, a droplet discharging device provided with the head driving device, a head drive program, and a device manufacturing method having a process for discharging a viscous body by using the method as one of a manufacturing process.

SOLUTION: A drive signal COM is a signal to be applied to a pressure generation element such as a piezoelectric element provided on a head. A clock signal CLK2 is a signal to be supplied to a drive signal generation circuit for generating the drive signal COM, and the drive signal generation circuit synchronizes with the clock signal CLK2 to generate the drive signal COM. The rate of change of a voltage value of the drive signal COM per unit time is made variable by making the frequency of the clock signal CLK2 variable in accordance with the deformation rate of the pressure generation element per unit time.

COPYRIGHT: (C)2003,JPO