发明名称 Blazed micro-mechanical light modulator and array thereof
摘要 A light valve of deformable grating type and a method for light modulation using the light valves is provided. The light valve of deformable grating type, includes at least three beams, one beam of the at least three beams being of a substantially fixed-position, and at least two beams of the at least three beams being deformable by electrostatic force in a substantially staircase structure, each step of the staircase creating a predefined change in the phase of an impinging light beam, a first electrode and a second electrode, the electrodes transmitting electrostatic force to at least the deformable beams of the at least three beams. The beam of a substantially fixed-position may be deformable by electrostatic force.
申请公布号 US6618187(B2) 申请公布日期 2003.09.09
申请号 US20010901728 申请日期 2001.07.11
申请人 CREO IL. LTD. 发明人 PILOSSOF NISSIM
分类号 G02B5/18;G02B26/08;(IPC1-7):G02B26/00 主分类号 G02B5/18
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