发明名称 |
Integrated active moisture and oxygen getter layers |
摘要 |
An integrated circuit structure comprises a main dielectric layer having a top surface. A cavity having sidewalls is formed in the main dielectric layer. A liner is formed on the sidewalls of the cavity. A metal conductor such as copper is formed over the liner filling the lined cavity. A getter layer is formed in the structure which combines with oxygen/moisture to form inert reaction products thereof. The getter layer can be either a conductive material which can be included in the liner or a dielectric layer which can be formed on top of the main dielectric layer, buried in the main dielectric layer or below the main dielectric layer. |
申请公布号 |
AU2003217368(A8) |
申请公布日期 |
2003.09.09 |
申请号 |
AU20030217368 |
申请日期 |
2003.02.06 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
STEPHEN M. GATES;VINCENT J. MCGAHAY;JOHN A. FITZSIMMONS |
分类号 |
H01L23/26;H01L23/522;H01L23/532;(IPC1-7):H01L29/41 |
主分类号 |
H01L23/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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