Ultrasonic inspection method, ultrasonic test method and ultrasonic inspection apparatus

摘要

The invention is directed to an ultrasonic inspection method, an ultrasonic test method, and an ultrasonic inspection apparatus that enable sizing to be executed even for a minute defect using an ultrasonic wave. A holder holds a transmitting probe for executing an angle beam method and a receiving probe for executing a vertical beam method. A motor and a guide rail form a movement mechanism for the transmitting probe and the receiving probe. In an ultrasonic test mode, the transmitting probe executes the angle beam method and transmits and receives an ultrasonic wave. In a sizing mode, the transmitting probe transmits an ultrasonic wave and the receiving probe receives this wave. A tip echo of a wave diffracted from a tip of a defect on a sample and a corner echo reflected from a corner of the defect are measured from a waveform received by the receiving probe.

主权项

1. An ultrasonic inspection apparatus comprising;
a holder that holds a transmitting probe capable of executing an angle beam method and a receiving probe capable of executing a vertical beam method; a movement mechanism that is capable of moving the transmitting probe and the receiving probe; a transceiver that executes an ultrasonic test mode in which the transmitting probe executes the angle beam method and thereby transmits and receives an ultrasonic wave and a sizing mode in which the transmitting probe transmits an ultrasonic wave and the receiving probe receives the ultrasonic wave; a controller that controls the transceiver and the movement mechanism; and a display unit that displays, stores and evaluates data obtained by the methods, wherein the transceiver includes a pulsar that includes a transmission delay unit for delaying a transmission signal corresponding to one or more elements included in the probe by a delay time and a transmitter for transmitting an ultrasonic wave, and a receiver that includes an analog-to-digital converter for converting the received ultrasonic wave to a digital signal and a memory unit for delaying the received signal by a delay time, and wherein the controller includes a delay controller that controls the delay times, a summing unit that sums received signals, a multiplier that multiplies a signal obtained by summing the received signals by the summing unit by a value set on the basis of the ultrasonic test mode, and a computer for control and processing that stores the received signals and has a processor for processing data.