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发明名称
METHOD AND APPARATURS FOR TREATING SUBSTRATE
摘要
申请公布号
KR20030071830(A)
申请公布日期
2003.09.06
申请号
KR20037009536
申请日期
2003.07.18
申请人
发明人
分类号
H01L21/316;H01L21/00;H01L21/3105;H01L21/312
主分类号
H01L21/316
代理机构
代理人
主权项
地址
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