| 摘要 |
PROBLEM TO BE SOLVED: To provide quartz-based optical waveguide components for reducing polarization dependence used for a light communication system. SOLUTION: A quartz-based optical waveguide component 10 comprises a substrate 1, an intermediate layer 12 formed on the substrate, and a quartz- based optical waveguide layer 7 comprising a core 3 formed by a quartz-based material on the intermediate layer, and a cladding layer 5 formed by a quartz- based material for accommodating the core. The Young's modulus in the intermediate layer is smaller than that of the quartz-based optical waveguide layer and the substrate. Additionally, in the intermediate layer, a porous layer with silicon or silicon oxide as a main constituent is preferable. COPYRIGHT: (C)2003,JPO |
