| 摘要 |
PROBLEM TO BE SOLVED: To provide a device for aligning substrates with which yields of a liquid crystal display panel to be finally manufactured and so on are improved and the cost of equipment is reduced. SOLUTION: A lower stage 11 and an upper stage 12 hold a lower substrate 31 or an upper substrate 32. Members 35 to measure a gap with a circular cylinder shape are applied to a surface of the lower substrate 31 together with a sealant 33. The upper stage 12 holding the upper substrate 32 is moved downward by controlling a Z-axis motor 23 and the lower substrate 31 and the upper substrate 32 are aligned to each other via the sealant 33. At this time, the shape of the members 35 to measure the gap is measured with CCD (charge coupled device) cameras 16, 17 and an image processor 20. On the basis of the result of the measurement, positioning or the like of the lower stage 11 is controlled with a controller 21 so as to make the gap between the lower substrate 31 and the upper substrate 32 uniform in the planar direction. COPYRIGHT: (C)2003,JPO
|
