| 摘要 |
PROBLEM TO BE SOLVED: To easily form and process a disk support reference plane, and to suppress transmission of vibrations of a disk chucking table to a disk. SOLUTION: The disk chucking table 1 is provided with a bearing part 3 in a core portion and, a disk support 4 in a rim portion so as to clamp and chuck the disk 201 against a disk support plane at the upper face of the disk support 4. The disk support plane is constituted of a disk support reference plane formed at an end face of a plurality of projections 5 provided in a protruding condition at a part of the disk support 4, and a friction sheet 7 attached to the disk support 4. COPYRIGHT: (C)2003,JPO
|
