| 摘要 |
PROBLEM TO BE SOLVED: To provide a height measuring apparatus capable of accurately measuring a height even when there is a stray light due to a multiple reflection or a disturbance light in the apparatus for measuring the height based on a reflected light from an object to be measured. SOLUTION: The height measuring apparatus comprises one or a plurality of light intensity detecting means disposed near an optical position detecting means to indicate reliability information of the measured height based on the output of the intensity detecting means and to simultaneously improve the accuracy of the measured height. When the height is measured from a plurality of directions, reliability information of the measured height of each direction is indicated from the output of the intensity detecting means, thereby improving the accuracy by removing a low accuracy measured height. COPYRIGHT: (C)2003,JPO
|
